O'Connell, John P. Thermodynamics fundamentals for applications / [Book] : J.P. O'Connell and J.M. Haile. - Cambridge ; New York : Cambridge University Press, c2005. - xv, 654 p. : ill. ; 26 cm. All. All. ISBN: 0521687241 (paperback) Subjects--Topical Terms: Thermodynamics.Cathode sputtering (Plating process)Thin films. Dewey Class. No.: 536.7