Liu, Ai-Qun. <br/><br/>
Photonic MEMS devices  design, fabrication and control /  [Book] : 
Ai-Qun Liu ; co-authors, Xuming Zhang ... [et al.]. 
 - Boca Raton, FL :  CRC Press,  c2009. 
 - 483 p. :  ill. ;  27 cm. 
 - Optical science and engineering series ;  136 .
<br/><br/> All. 
<br/><br/><label>ISBN: </label>9781420045680 
<br/><br/><label>Nat. Bib. No.: </label>GBA8B7636  bnb 
<br/><br/><label>Nat. Bib. Agency Control No.: </label>013807776  Uk 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.<br/>Photonics.
<br/><br/><label>Dewey Class. No.: </label>621.381