Fundamental aspects of silicon oxidation  [Book] / 
Yves J. Chabal (ed.). 
 - Berlin ; :  Springer,  c2001. 
 - xiii, 260 p. :  ill. (some col.) ;  24 cm. 
 - Springer series in materials science ;  46. .
<br/><br/> All. 
<br/><br/><label>ISBN: </label>354041682X 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Silicon oxide.
<br/><br/><label>Dewey Class. No.: </label>546.6832