CMOS cantilever sensor systems atomic force microscopy and gas sensing applications / [Book] :
D. Lange, O. Brand, H. Baltes.
- Berlin ; New York : Springer, c2002.
- viii, 142 p. : ill. ; 25 cm.
- Microtechnology and MEMS .
All.
3540431438 (alk. paper)
Microelectromechanical systems--Design and construction. Metal oxide semiconductors, Complementary--Design and construction. Levers--Design and construction. Atomic force microscopy--Equipment and supplies--Design and construction. Gas detectors--Design and construction.