Process technology for silicon carbide devices  [Book] / 
edited by Carl-Mikael Zatterling. 
 - London :  Institution of Electrical Engineers,  c2002. 
 - xxii, 176 p. :  ill. ;  26 cm. 
 - EMIS processing series ;  no. 2. .
<br/><br/> All. 
<br/><br/><label>ISBN: </label>0852969988 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Silicon carbide--Electric properties.
<br/><br/><label>Dewey Class. No.: </label>621.38152