Microcircuit engineering 92  proceedings of the International Conference on Microfabrication, September 21-24, 1992, Erlangen, Germany /  [Book] : 
edited by Heiner Ryssel, Dieter Stephani. 
 - Amsterdam :  Elsevier,  1993. 
 - 500 p. ;  27cm. 
 -  v. 21, no. 1/4  0167-9317 ; .
<br/><br/> Includes authoer index 
<br/><br/> All. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electronic engineering.<br/>Microelectronics--Congresses.
<br/><br/><label>Dewey Class. No.: </label>621.38173