Madou, Marc J. <br/><br/>
Fundamentals of microfabrication  the science of miniaturization /  [Book] : 
Marc J. Madou. 
 - 2nd ed. 
 - Boca Raton :  CRC Press,  c2002. 
 - 723 p. :  col. ill. ;  29 cm. 
<br/><br/> All. 
<br/><br/><label>ISBN: </label>0849308267 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics.<br/>Integrated circuits--Design and construction.<br/>Microelectromechanical systems--Design and construction.<br/>Machining.<br/>Microelectronic packaging.<br/>Lasers--Industrial applications.
<br/><br/><label>Dewey Class. No.: </label>621.38152