Elwenspoek, M.  1948- <br/><br/>
Mechanical microsensors  [Book] / 
M. Elwenspoek, R. Wiergerink. 
 - Berlin ; :  Springer,  c2001. 
 - x, 295 p. :  ill. ;  25 cm. 
 - Microtechnology and MEMS. .
<br/><br/> All. 
<br/><br/><label>ISBN: </label>3540675825 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Detectors--Design and construction.<br/>Microelectromechanical systems--Design and construction.<br/>Transducers.<br/>Silicon.<br/>Micromachining.
<br/><br/><label>Dewey Class. No.: </label>681.2