Microcircuit engineering 82  International Conference on Microlithography, October 5-8, 1982, Grenoble, France = Colloque international sur la microlithographie  [Book] : 

 - Grenoble :  Comit ̌du Colloque international sur la microlithographie,  1982. 
 - xvi, 379 p. :  ill. ;  30 cm. 
<br/><br/> Cover title.  English and French. 
<br/><br/> All. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--Large scale integration--Congresses.<br/>Photolithography--Congresses.
<br/><br/><label>Dewey Class. No.: </label>621.38173