MEMS packaging  [Book] / 
edited by Tai-Ran Hsu. 
 - London :  Institution of Electrical Engineers,  2004. 
 - xxix, 275 p. :  ill. 
<br/><br/> All. 
<br/><br/><label>ISBN: </label>0863413358 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.<br/>Microelectronic packaging.
<br/><br/><label>Dewey Class. No.: </label>621.381