MEMS :  design and fabrication /  [Book] : 
edited by Mohamed Gad-el-Hak. 
 - Second edition. 
 - Boca Raton, FL :  CRC/Taylor & Francis,  2006. 
 - 1 v. (various pagings) :  illustrations ;  26 cm. 
 - Mechanical engineering series The MEMS handbook .
<br/><br/> One of three parts whose previous edition was a published as a single volume. 
<br/><br/> All. 
<br/><br/><label>ISBN: </label>0849391385 (hbk) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems--Design and construction.<br/>Microfabrication.<br/>Microelectromechanical systems.--Nanotechnology<br/>Mechanical engineering.--Microelectronics
<br/><br/><label>Dewey Class. No.: </label>621.381