Sugawara, M. <br/><br/>
Plasma etching  fundamentals and applications /  [Book] : 
M. Sugawara ; with contributions from Barry L. Stonsfield ... [et al.]. 
 - New York :  Oxford University Press,  1998. 
 - viii, 347 p. :  ill. (some col.) ;  24 cm. 
 - Series on semiconductor science and technology ;  7 .
<br/><br/> All. 
<br/><br/><label>ISBN: </label>019856287X 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Etching.<br/>Plasma etching.
<br/><br/><label>Dewey Class. No.: </label>621.381531