Allen, James J. <br/><br/>
Micro electro mechanical system design  [Book] / 
James J. Allen. 
 - Boca Raton :  Taylor & Francis,  2005. 
 - 465 p. :  ill. ;  23 cm. 
 - Mechanical engineering ;  192 .
<br/><br/> All. 
<br/><br/><label>ISBN: </label>0824758242 (alk. paper) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems--Design and construction.<br/>Engineering design.
<br/><br/><label>Dewey Class. No.: </label>621