Ruska, W. Scot <br/><br/>
Microelectronic processing  an introduction to the manufacture of integrated circuits /  [Book] : 
W. Scot Ruska. 
 - New York :  McGraw-Hill,  c1987. 
 - xviii, 430 p. :  ill. ;  25 cm. 
 - McGraw-Hill series in electrical engineering .
<br/><br/> Includes index 
<br/><br/> All. 
<br/><br/><label>ISBN: </label>0070542805 (pbk) 0070542805 (text) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--Design and construction.
<br/><br/><label>Dewey Class. No.: </label>621.38173