Microlithography  science and technology /  [Book] : 
edited by James R. Sheats, Bruce W. Smith. 
 - New York :  Marcel Dekker,  c1998. 
 - xii, 780 p. :  ill. ;  24 cm. 
<br/><br/> Index includes 
<br/><br/> All. 
<br/><br/><label>ISBN: </label>0824799534 (alk. paper) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microlithography--Industrial applications.<br/>Integrated circuits--Masks.<br/>Metal oxide semiconductors, Complementary--Design and construction.<br/>Manufacturing processes.
<br/><br/><label>Dewey Class. No.: </label>621.3815 31