Dammel, Ralph, 1954- Diazonaphthoquinone-based resists [Book] / Ralph Dammel. - Bellingham, Wash., USA : SPIE Optical Engineering Press, c1993. - 203 p. : ill. ; 26 cm. - Tutorial texts in optical engineering ; v. TT 11 . All. ISBN: 0819410195 Subjects--Topical Terms: Photoresists.Masks (Electronics). Dewey Class. No.: 621.381531