Handbook of microlithography, micromachining, and microfabrication  microlithgraphy /  [Book] : 
P. Rai-Choudhury, editor. 
 - Bellingham, Wash., USA :  London, UK :  SPIE Optical Engineering Press ;  Institution of Electrical Engineers,  c1997. 
 - 1 v. viii, 768p. :  ill. ;  26 cm. 
 - IEE materials and devices series ;  12A-12B .
<br/><br/> All. 
<br/><br/><label>ISBN: </label>0819423785 (v. 1) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microlithography.<br/>Micromachining.<br/>Microfabrication.
<br/><br/><label>Dewey Class. No.: </label>670