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Process engineering analysis in semiconductor device fabrication [Book] / Stanley Middleman, Arthur K. Hochberg.

By: Contributor(s): Material type: TextTextSeries: McGraw-Hill chemical engineering seriesPublication details: New York : McGraw-Hill, Inc, c1993.Description: xvii, 774 p. : ill. ; 25 cmISBN:
  • 0071127445
Subject(s): DDC classification:
  • 621.38152 20
Other classification:
  • 621.38152
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