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Microcircuit Engineering 89 [Book] : proceedings of the International Conference on Microlithography, September 26-28, 1989, Cambridge, England / edited by H. Ahmed ... [et al.].

Contributor(s): Material type: TextTextPublication details: New York, New York : Elsevier ; Tokyo : Ohmsha ; New York, N.Y., U.S.A. : Distributors for the United States and Canada, Elsevier Science Pub. Co., c1990.Description: 708 p. : ill. ; 27 cmISBN:
  • 0444881824 (hbk)
Subject(s): DDC classification:
  • 621.38173
  • 621.381 20
Other classification:
  • 621.38173
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