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Process technology for silicon carbide devices [Book] / edited by Carl-Mikael Zatterling.

Contributor(s): Material type: TextTextSeries: EMIS processing series ; no. 2.Publication details: London : Institution of Electrical Engineers, c2002.Description: xxii, 176 p. : ill. ; 26 cmISBN:
  • 0852969988
Subject(s): DDC classification:
  • 621.38152
Other classification:
  • 621.38152
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