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Copper-fundamental mechanisms for microelectronic applications [Book] / Shyam P. Murarka, Igor V. Verner, Ronald J. Gutmann.

By: Contributor(s): Material type: TextTextPublication details: New York : John Wiley & Sons, Inc., c2000.Description: xxviii, 337 p. ; : ill. ; 25 cmISBN:
  • 0471252565
Subject(s): DDC classification:
  • 621.38152 21
Other classification:
  • 621.38152
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