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Proceedings of the 36th international symposium on electron, ion, and photon beams [Book] : 26-29 May 1992, the Peabody Hotel, Orlando, Florida / special editor for the proceedings, Randy Kubena.

Contributor(s): Material type: ArticleArticlePublication details: New York : Published for the American Vacuum Society by the American Institute of Physics, 1992.Description: p. 2509-3260ISBN:
  • 1563961342 (hbk)
Subject(s): DDC classification:
  • 535.5
Other classification:
  • 535.5
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Sponsored by the American Vacuum Society in cooperation with the Electron Device Society of the IEEE and the Optical Society of America.

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