Handbook of microlithography, micromachining, and microfabrication (Record no. 147453)
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000 -LEADER | |
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fixed length control field | 00934cam a2200253 a 4500 |
001 - CONTROL NUMBER | |
control field | 0000039610 |
003 - CONTROL NUMBER IDENTIFIER | |
control field | 0001 |
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
fixed length control field | 961204m19971997waua b 001 0 eng |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
International Standard Book Number | 0819423785 (v. 1) |
035 ## - SYSTEM CONTROL NUMBER | |
-- | (DLC) 96040237 |
040 ## - CATALOGING SOURCE | |
Original cataloging agency | DLC |
Transcribing agency | DLC |
Modifying agency | DLC |
082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
Classification number | 670 |
Edition number | 21 |
084 ## - OTHER CLASSIFICATION NUMBER | |
Classification number | 670 |
Item number | HAN |
245 00 - TITLE STATEMENT | |
Title | Handbook of microlithography, micromachining, and microfabrication |
Medium | [Book] : |
Remainder of title | microlithgraphy / |
Statement of responsibility, etc. | P. Rai-Choudhury, editor. |
260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
Place of publication, distribution, etc. | Bellingham, Wash., USA : |
Name of publisher, distributor, etc. | SPIE Optical Engineering Press ; |
Place of publication, distribution, etc. | London, UK : |
Name of publisher, distributor, etc. | Institution of Electrical Engineers, |
Date of publication, distribution, etc. | c1997. |
300 ## - PHYSICAL DESCRIPTION | |
Extent | 1 v. viii, 768p. : |
Other physical details | ill. ; |
Dimensions | 26 cm. |
490 1# - SERIES STATEMENT | |
Series statement | IEE materials and devices series ; |
Volume/sequential designation | 12A-12B |
521 ## - TARGET AUDIENCE NOTE | |
Target audience note | All. |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name entry element | Microlithography. |
Topical term or geographic name entry element | Micromachining. |
Topical term or geographic name entry element | Microfabrication. |
700 2# - ADDED ENTRY--PERSONAL NAME | |
Personal name | Rai-Choudhury, P. |
852 ## - LOCATION | |
Accession No. | 24566 |
-- | 0.00 |
Former shelving location | Reference |
Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Shelving location | Date acquired | Total checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|
Junaid Zaidi Library, COMSATS University Islamabad | Junaid Zaidi Library, COMSATS University Islamabad | Ground Floor | 09/18/2023 | 670 HAN | 24566 | 09/18/2023 | 09/18/2023 | Books |