Handbook of microlithography, micromachining, and microfabrication (Record no. 147453)

MARC details
000 -LEADER
fixed length control field 00934cam a2200253 a 4500
001 - CONTROL NUMBER
control field 0000039610
003 - CONTROL NUMBER IDENTIFIER
control field 0001
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 961204m19971997waua b 001 0 eng
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 0819423785 (v. 1)
035 ## - SYSTEM CONTROL NUMBER
-- (DLC) 96040237
040 ## - CATALOGING SOURCE
Original cataloging agency DLC
Transcribing agency DLC
Modifying agency DLC
082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 670
Edition number 21
084 ## - OTHER CLASSIFICATION NUMBER
Classification number 670
Item number HAN
245 00 - TITLE STATEMENT
Title Handbook of microlithography, micromachining, and microfabrication
Medium [Book] :
Remainder of title microlithgraphy /
Statement of responsibility, etc. P. Rai-Choudhury, editor.
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Place of publication, distribution, etc. Bellingham, Wash., USA :
Name of publisher, distributor, etc. SPIE Optical Engineering Press ;
Place of publication, distribution, etc. London, UK :
Name of publisher, distributor, etc. Institution of Electrical Engineers,
Date of publication, distribution, etc. c1997.
300 ## - PHYSICAL DESCRIPTION
Extent 1 v. viii, 768p. :
Other physical details ill. ;
Dimensions 26 cm.
490 1# - SERIES STATEMENT
Series statement IEE materials and devices series ;
Volume/sequential designation 12A-12B
521 ## - TARGET AUDIENCE NOTE
Target audience note All.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Microlithography.
Topical term or geographic name entry element Micromachining.
Topical term or geographic name entry element Microfabrication.
700 2# - ADDED ENTRY--PERSONAL NAME
Personal name Rai-Choudhury, P.
852 ## - LOCATION
Accession No. 24566
-- 0.00
Former shelving location Reference
Holdings
Withdrawn status Lost status Damaged status Not for loan Home library Current library Shelving location Date acquired Total checkouts Full call number Barcode Date last seen Price effective from Koha item type
        Junaid Zaidi Library, COMSATS University Islamabad Junaid Zaidi Library, COMSATS University Islamabad Ground Floor 09/18/2023   670 HAN 24566 09/18/2023 09/18/2023 Books