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Nano-and micro-electromechanical systems fundamentals of nano-and microengineering

Lyshevski, Sergay Edward

Nano-and micro-electromechanical systems fundamentals of nano-and microengineering [Book] Sergay Edward Lyshevski. - 2nd Ed. - CRC Press New York

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ISBN: 849328381

Subjects--Topical Terms:
Microeletromechanical Systems

Dewey Class. No.: 621.381

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