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Microsystem technology

Menz, W.

Microsystem technology [Book] / W. Menz, J. Mohr, O. Paul. - Weinheim ; New York : Wiley-VCH, 2001. - xii, 500 p. : ill. ; 25 cm.

Index includes

All.

ISBN: 3527307877

Subjects--Topical Terms:
Technology.
Engineering.

Dewey Class. No.: 621.381

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