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Photonic MEMS devices design, fabrication and control /

Liu, Ai-Qun.

Photonic MEMS devices design, fabrication and control / [Book] : Ai-Qun Liu ; co-authors, Xuming Zhang ... [et al.]. - Boca Raton, FL : CRC Press, c2009. - 483 p. : ill. ; 27 cm. - Optical science and engineering series ; 136 .

All.

ISBN: 9781420045680

Nat. Bib. No.: GBA8B7636 bnb

Nat. Bib. Agency Control No.: 013807776 Uk

Subjects--Topical Terms:
Microelectromechanical systems.
Photonics.

Dewey Class. No.: 621.381

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