CMOS cantilever sensor systems atomic force microscopy and gas sensing applications /
Lange, D. 1970-
CMOS cantilever sensor systems atomic force microscopy and gas sensing applications / [Book] : D. Lange, O. Brand, H. Baltes. - Berlin ; New York : Springer, c2002. - viii, 142 p. : ill. ; 25 cm. - Microtechnology and MEMS .
All.
3540431438 (alk. paper)
Microelectromechanical systems--Design and construction.
Metal oxide semiconductors, Complementary--Design and construction.
Levers--Design and construction.
Atomic force microscopy--Equipment and supplies--Design and construction.
Gas detectors--Design and construction.
681.413
CMOS cantilever sensor systems atomic force microscopy and gas sensing applications / [Book] : D. Lange, O. Brand, H. Baltes. - Berlin ; New York : Springer, c2002. - viii, 142 p. : ill. ; 25 cm. - Microtechnology and MEMS .
All.
3540431438 (alk. paper)
Microelectromechanical systems--Design and construction.
Metal oxide semiconductors, Complementary--Design and construction.
Levers--Design and construction.
Atomic force microscopy--Equipment and supplies--Design and construction.
Gas detectors--Design and construction.
681.413