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Fundamentals of microfabrication the science of miniaturization /

Madou, Marc J.

Fundamentals of microfabrication the science of miniaturization / [Book] : Marc J. Madou. - 2nd ed. - Boca Raton : CRC Press, c2002. - 723 p. : col. ill. ; 29 cm.

All.

ISBN: 0849308267

Subjects--Topical Terms:
Microelectronics.
Integrated circuits--Design and construction.
Microelectromechanical systems--Design and construction.
Machining.
Microelectronic packaging.
Lasers--Industrial applications.

Dewey Class. No.: 621.38152

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