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Microcircuit engineering 82 International Conference on Microlithography, October 5-8, 1982, Grenoble, France = Colloque international sur la microlithographie

Microcircuit engineering 82 International Conference on Microlithography, October 5-8, 1982, Grenoble, France = Colloque international sur la microlithographie [Book] : - Grenoble : Comit ̌du Colloque international sur la microlithographie, 1982. - xvi, 379 p. : ill. ; 30 cm.

Cover title. English and French.

All.

Subjects--Topical Terms:
Integrated circuits--Large scale integration--Congresses.
Photolithography--Congresses.

Dewey Class. No.: 621.38173

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