Silicon wafer bonding technology for VLSI and MEMS applications /

Silicon wafer bonding technology for VLSI and MEMS applications / [Book] : edited by Subramanian S. Iyer and Andre J. Auberton-Herv.̌ - London : Institution of Electrical Engineers, c2002. - xxv, 149 p. : ill. ; 26 cm. - EMIS processing series ; no. 1 .

All.

0852960395

GBA1-V4185


Silicon-on-insulator technology.
Integrated circuits--Very large scale integration.
Microelectromechanical systems.

621.38152