MEMS introduction and fundamentals /
MEMS introduction and fundamentals / [Book] :
edited by Mohamed Gad-El-Hak.
- 2nd ed.
- Boca Raton : CRC/Taylor & Francis, 2006.
- 1 v. (various pagings) : ill. ; 26 cm.
- Mechanical engineering series The MEMS handbook .
One of three parts whose previous edition was a published as a single volume.
All.
0849391377 (hbk)
Microelectromechanical systems.
Microelectronics.
Nanotechnology.
621.381
One of three parts whose previous edition was a published as a single volume.
All.
0849391377 (hbk)
Microelectromechanical systems.
Microelectronics.
Nanotechnology.
621.381