MEMS applications /

MEMS applications / [Book] : edited by Mohamed Gad-el-Hak. - 2nd ed. - Boca Raton, FL : CRC Press/Taylor & Francis, 2006. - 1 v. (various pagings) : ill. ; 26 cm. - Mechanical engineering series The MEMS handbook .

One of three parts whose previous edition was a published as a single volume.

All.

0849391393 (alk. paper)


Microelectromechanical systems.
Detectors.
Microactuators.
Robots.

621.381