Microelectronic processing an introduction to the manufacture of integrated circuits /
Ruska, W. Scot
Microelectronic processing an introduction to the manufacture of integrated circuits / [Book] : W. Scot Ruska. - New York : McGraw-Hill, c1987. - xviii, 430 p. : ill. ; 25 cm. - McGraw-Hill series in electrical engineering .
Includes index
All.
0070542805 (pbk) 0070542805 (text)
Integrated circuits--Design and construction.
621.38173
Microelectronic processing an introduction to the manufacture of integrated circuits / [Book] : W. Scot Ruska. - New York : McGraw-Hill, c1987. - xviii, 430 p. : ill. ; 25 cm. - McGraw-Hill series in electrical engineering .
Includes index
All.
0070542805 (pbk) 0070542805 (text)
Integrated circuits--Design and construction.
621.38173