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Handbook of optical metrology principles and applications /

Handbook of optical metrology principles and applications / [Book] : edited by Toru Yoshizawa. - Boca Raton : CRC Press, c2009. - xiii, 730 p. : ill. ; 27 cm.

Includes index

All.

ISBN: 9780849337604 (hbk)

Subjects--Topical Terms:
Optical measurements--Handbooks, manuals, etc.
Metrology--Handbooks, manuals, etc.

Dewey Class. No.: 681.25

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