Modeling MEMS and NEMS
Pelesko, John A.
Modeling MEMS and NEMS [Book] / John A. Pelesko and David H. Bernstein. - Boca Raton, FL : Chapman & Hall/CRC, 2003. - xxiii, 357 p. : ill. ; 24 cm.
All.
1584883065 (alk. paper)
Microelectromechanical systems--Mathematical models.
621.3
Modeling MEMS and NEMS [Book] / John A. Pelesko and David H. Bernstein. - Boca Raton, FL : Chapman & Hall/CRC, 2003. - xxiii, 357 p. : ill. ; 24 cm.
All.
1584883065 (alk. paper)
Microelectromechanical systems--Mathematical models.
621.3