Microcircuit engineering 90 proceedings of the International Conference on Microlithography, September 18-20, 1990, Leuven, Belgium /

Microcircuit engineering 90 proceedings of the International Conference on Microlithography, September 18-20, 1990, Leuven, Belgium / [Book] : edited by G. Declerck, L. Van den Hove, F. Coopmans. - Amsterdam : Elsevier, c1991. - 573 p. : ill. ; 27 cm.

Includes index

All.

0444890874 (hbk)


Microelectronics--Congresses.
Microlithography--Congresses.

621.38173