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Scientific wet process technology for innovative LSI/FPD manufacturing

Scientific wet process technology for innovative LSI/FPD manufacturing [Book] / edited by Tadahiro Ohmi. - Boca Raton, FL : CRC/Taylor & Francis, 2006. - 386 p. : ill. ; 27 cm.

All.

ISBN: 0849335434 (alk. paper) 9780849335433

Subjects--Topical Terms:
Semiconductors--Design and construction.
Semiconductors--Cleaning.
Integrated circuits--Design and construction.

Dewey Class. No.: 621.3815 2

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